Electron Beam Testing Technology - Couverture souple

Couverture souple

ISBN 10 : 1489915249 ISBN 13 : 9781489915245

Editeur : Springer, 2013

Synopsis

Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being fabricated on design rules of several microns, the mechanical ne edle probe served quite adequately for internal chip probing. This scenario changed with growing device complexity and shrinking geometries, prompting IC manufacturers to take note ofthis new testing technology. It required several more years and considerable investment by electron beam tester manufacturers, however, to co me up with user-friendly automated systems that were acceptable to IC test engineers. These intervening years witnessed intense activity in the development of instrumentation, testing techniques, and system automation, as evidenced by the proliferation of technical papers presented at conferences. With the shift of interest toward applications, the technology may now be considered as having come of age.

A propos du livre

Présentation de l'éditeur

This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology.

Détails de l'édition

• Éditeur: Springer
• Date d'édition: 2013
• Langue: anglais
• ISBN 10: 1489915249
• ISBN 13: 9781489915245
• Reliure: Broché
• Nombre de pages: 480
• Éditeur: Thong John T.L.
• Coordonnées du fabricant: Springer Nature Customer Service Center GmbH; ProductSafety@springernature.com; ; Europaplatz 3; Heidelberg; 69115; Allemagne