Ulsi Technology - Couverture rigide

Chang, C.Y.; Sze, Simon

Couverture rigide

ISBN 10 : 0070630623 ISBN 13 : 9780070630628

Editeur : McGraw-Hill Professional, 1996

Synopsis

This text follows the tradition of Sze's highly successful pioneering text on VLSI technology and is updated with the latest advances in the field of microelectronic chip fabrication. Since computer chips are foundations of modern electronics, these topics are essential for the next generation of USLI technologies, allowing more transistors to be packaged on a single chip. Contributing to each chapter are industry experts, specializing in topics such as epitaxy with low temperature process, rapid thermal processes, low damage plasma reactive ion etching, fine line litography, cleaning technology, clean room technology, packing and reliability.

Détails de l'édition

• Éditeur: McGraw-Hill Professional
• Date d'édition: 1996
• Langue: anglais
• ISBN 10: 0070630623
• ISBN 13: 9780070630628
• Reliure: Relié
• Nombre de pages: 688
• Coordonnées du fabricant: non disponible
• Personne responsable: non disponible