Rapid Thermal Processing: Science and Technology - Couverture rigide

 
9780122476907: Rapid Thermal Processing: Science and Technology
Couverture rigide
ISBN 10 : 0122476905 ISBN 13 : 9780122476907
Editeur : Academic Press Inc, 1993

Synopsis

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Présentation de l'éditeur

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
Academic Press Inc
Date d'édition
1993
Langue
anglais
ISBN 10 
0122476905
ISBN 13 
9780122476907
Reliure
Relié
Nombre de pages
430
Éditeur
Fair Richard B.
Coordonnées du fabricant
non disponible
Personne responsable
Yeepin GmbH
492000000000
sunshine12232@outlook.com

Alleestr.11
Kaiserslautern
Rheinland-Pfalz
67655
Allemagne

Autres éditions populaires du même titre

9780124119895: Rapid Thermal Processing: Science and Technology

Edition présentée

ISBN 10 :  0124119891 ISBN 13 :  9780124119895
Editeur : Academic Press, 2012
Couverture souple