Articles liés à A User's Guide to Ellipsometry
Synopsis
This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
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Présentation de l'éditeur
This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
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A User's Guide to Ellipsometry
Edité par
Academic Press, 1992
ISBN 10 : 0126939500
ISBN 13 : 9780126939507
Ancien ou d'occasion
Couverture rigide
Vendeur : The Book Corner, Beaverton, OR, Etats-Unis
Évaluation du vendeur 5 sur 5 étoiles
hardcover. Etat : Very Good. Hardback. No dust jacket. Cover edges and corners in good shape. Spine is tight. Former owner's name inside front cover Pages are clean, no markings, notes or stains. Ships from Friends bookstore to benefit Beaverton (Oregon) library. N° de réf. du vendeur mon0000061385
Quantité disponible : 1 disponible(s)
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A USER'S GUIDE TO ELLIPSOMETRY.
Edité par
Academic Press:, 1993
ISBN 10 : 0126939500
ISBN 13 : 9780126939507
Ancien ou d'occasion
Couverture rigide
Vendeur : PASCALE'S BOOKS, NORTH READING, MA, Etats-Unis
Évaluation du vendeur 5 sur 5 étoiles
Hard Cover. Etat : Fine-. 260 pages. "Ellipsometry is a very old technque for studying surfaces and thein films. It is also used extensively in integrated circuit(IC) manufacture and development, in corrosion science, and various other areas. The fundamental principles of the technqiues are well known. Although the literature is extensive, the few available books deal with the subect on a level that is too mathematical or theoretical for most casual users. FINE- HARDCOVER, black cloth covers, lettering is bright on the spine and cover. Size: 8vo - over 7¾" - 9¾" tall. N° de réf. du vendeur 028511
Quantité disponible : 1 disponible(s)
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A User's Guide to Ellipsometry
Edité par
Academic Press, 1992
ISBN 10 : 0126939500
ISBN 13 : 9780126939507
Ancien ou d'occasion
Couverture rigide
Vendeur : HPB-Red, Dallas, TX, Etats-Unis
Évaluation du vendeur 5 sur 5 étoiles
Hardcover. Etat : Good. Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or writing/highlighting. We ship orders daily and Customer Service is our top priority! N° de réf. du vendeur S_377864099
Quantité disponible : 1 disponible(s)
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A User's Guide to Ellipsometry
Vendeur : Toscana Books, AUSTIN, TX, Etats-Unis
Évaluation du vendeur 5 sur 5 étoiles
Hardcover. Etat : new. Excellent Condition.Excels in customer satisfaction, prompt replies, and quality checks. N° de réf. du vendeur Scanned0126939500
Quantité disponible : 1 disponible(s)
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A User's Guide to Ellipsometry
Vendeur : BennettBooksLtd, San Diego, NV, Etats-Unis
Évaluation du vendeur 5 sur 5 étoiles
hardcover. Etat : New. In shrink wrap. Looks like an interesting title! N° de réf. du vendeur Q-0126939500
Quantité disponible : 1 disponible(s)