A User's Guide to Ellipsometry - Couverture rigide
Livre 37 sur 53: Dover Civil and Mechanical Engineering
Synopsis
This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
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Présentation de l'éditeur
This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.
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Résultats de recherche pour A User's Guide to Ellipsometry
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A USER'S GUIDE TO ELLIPSOMETRY.
Edité par
Academic Press:, 1993
ISBN 10 : 0126939500
ISBN 13 : 9780126939507
Ancien ou d'occasion
Couverture rigide
Vendeur : PASCALE'S BOOKS, NORTH READING, MA, Etats-Unis
Évaluation du vendeur 5 sur 5 étoiles
Hard Cover. Etat : Fine-. 260 pages. "Ellipsometry is a very old technque for studying surfaces and thein films. It is also used extensively in integrated circuit(IC) manufacture and development, in corrosion science, and various other areas. The fundamental principles of the technqiues are well known. Although the literature is extensive, the few available books deal with the subect on a level that is too mathematical or theoretical for most casual users. FINE- HARDCOVER, black cloth covers, lettering is bright on the spine and cover. Size: 8vo - over 7¾" - 9¾" tall. N° de réf. du vendeur 028511
Acheter D'occasion
EUR 44,65
Expédition à EUR 4,77
Expédition nationale : Etats-Unis
Expédition nationale : Etats-Unis
Quantité disponible : 1 disponible(s)
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A User's Guide to Ellipsometry
Vendeur : BennettBooksLtd, Los Angeles, CA, Etats-Unis
Évaluation du vendeur 5 sur 5 étoiles
hardcover. Etat : New. In shrink wrap. Looks like an interesting title! N° de réf. du vendeur Q-0126939500
Acheter neuf
EUR 121,93
Expédition à EUR 6,03
Expédition nationale : Etats-Unis
Expédition nationale : Etats-Unis
Quantité disponible : 1 disponible(s)