This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.
This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.
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Destinations, frais et délaisVendeur : BoundlessBookstore, Wallingford, Royaume-Uni
Etat : Very Good. VG condition book without dust jacket. Boards are clean with little wear. Book has clean and bright contents, pen and previous owner stamp front endpaper, 260pp with illustrations. N° de réf. du vendeur 9999-9994450153
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Hard Cover. Etat : Fine-. 260 pages. "Ellipsometry is a very old technque for studying surfaces and thein films. It is also used extensively in integrated circuit(IC) manufacture and development, in corrosion science, and various other areas. The fundamental principles of the technqiues are well known. Although the literature is extensive, the few available books deal with the subect on a level that is too mathematical or theoretical for most casual users. FINE- HARDCOVER, black cloth covers, lettering is bright on the spine and cover. Size: 8vo - over 7¾" - 9¾" tall. N° de réf. du vendeur 028511
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