Introduction to Microelectronic Fabrication - Couverture souple

Jaeger, Richard C.

Couverture souple

ISBN 10 : 0201146959 ISBN 13 : 9780201146950

Editeur : Pearson, 1988

Synopsis

Modular Series on Solid State Devices. This volume is a concise survey of the most up-to-date techniques in the field. It is devoted excusively to processing and its highlighted by careful explanations.

A propos du livre

Quatrième de couverture

Introduction to Microelectronic Fabrication, Second Edition, by Richard C. Jaeger, is a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing and is highlighted by careful explanations, clean, simple language, and numerous fully solved example problems.

The second edition includes an entirely new chapter on MEMS, as well as substantial modifications to the chapters on MOS and bipolar process integration. Also included is new or expanded coverage of lithography and exposure systems, trench isolation, chemical mechanical polishing, shallow junctions, transient enhanced diffusion, copper Damascene processes and process simulation.

Présentation de l'éditeur

Modular Series on Solid State Devices. This volume is a concise survey of the most up-to-date techniques in the field. It is devoted excusively to processing and its highlighted by careful explanations.

Détails de l'édition

• Éditeur: Pearson
• Date d'édition: 1988
• Langue: anglais
• ISBN 10: 0201146959
• ISBN 13: 9780201146950
• Reliure: Broché
• Nombre de pages: 224
• Coordonnées du fabricant: non disponible
• Personne responsable: Riccardo Bacigalupo; riccardo.bacigalupo@sanoma.it; ; Sanoma Italia Via Arconati, 1 �; Milano; 20135; Italie