Radio-Frequency Capacitive Discharges - Couverture souple

Raizer, Yuri P.; Shneider, Mikhail N.; Yatsenko, Nikolai A.

Couverture souple

ISBN 10 : 036740186X ISBN 13 : 9780367401863

Editeur : CRC Press, 2019

Synopsis

The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings.

Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.

A propos du livre

À propos de l'auteur

Raizer, Yuri P.; Shneider, Mikhail N.; Yatsenko, Nikolai A.

Détails de l'édition

• Éditeur: CRC Press
• Date d'édition: 2019
• Langue: anglais
• ISBN 10: 036740186X
• ISBN 13: 9780367401863
• Reliure: Broché
• Nombre de pages: 304
• Coordonnées du fabricant: non disponible
• Personne responsable: non disponible