Physics of Radiofrequency Capacitive Discharge - Couverture souple

Savinov, V. P.

Couverture souple

ISBN 10 : 0367571625 ISBN 13 : 9780367571627

Editeur : CRC Press, 2020

Synopsis

This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.

A propos du livre

À propos de l'auteur

V. P. Savinov

À propos de la quatrième de couverture

This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.

Détails de l'édition

• Éditeur: CRC Press
• Date d'édition: 2020
• Langue: anglais
• ISBN 10: 0367571625
• ISBN 13: 9780367571627
• Reliure: Broché
• Nombre de pages: 342
• Coordonnées du fabricant: non disponible
• Personne responsable: GPSR Kontakt; gpsr@libri.de; ; Europaallee 1; Bad Hersfeld; 36244; Allemagne