Articles liés à MEMS Materials and Processes Handbook

MEMS Materials and Processes Handbook - Couverture rigide

 
9780387473161: MEMS Materials and Processes Handbook
Couverture rigide
ISBN 10 : 0387473165 ISBN 13 : 9780387473161
Editeur : Springer-Verlag New York Inc., 2011

Synopsis

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

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Présentation de l'éditeur

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Revue de presse

From the reviews: In this handbook, editors Ghodssi (Univ. of Maryland, College Park) and Lin (Touch Micro-system Technology, Taiwan) have essentially organized the collective knowledge of decades of MEMS research from around the world into one book. ... This volume is not designed as a textbook, but instead as a reference, and is extremely useful for MEMS inventors. Summing Up: Highly recommended. Graduate students, researchers/faculty, and professionals. --(N. M. Fahrenkopf, Choice, Vol. 49 (2), October, 2011)

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
Springer-Verlag New York Inc.
Date d'édition
2011
Langue
anglais
ISBN 10 
0387473165
ISBN 13 
9780387473161
Reliure
Relié
Nombre de pages
1224
Éditeur
Ghodssi Reza, Lin Pinyen
Coordonnées du fabricant
non disponible
Personne responsable
CMN Printpool Inh. Mathis Neumann
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