Fundamental Principles of Optical Lithography: The Science of Microfabrication - Couverture rigide

Mack, Chris

 
9780470018934: Fundamental Principles of Optical Lithography: The Science of Microfabrication
Couverture rigide
ISBN 10 : 0470018933 ISBN 13 : 9780470018934
Editeur : Wiley-Interscience, 2007

Synopsis

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components.

By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate.

This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter.

Additional Information:
Visiting http: //www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB(R), to accompany the textbook. You can also contact the author and find help for instructors.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

À propos de l?auteur

Dr. Chris A. Mack developed the lithography simulation software PROLITH, and founded and ran the company FINLE Technologies fro ten years. He then served as Vice President of Lithography Technology for KLA-Tencor for five years, until 2005. In 2003 he received the SEMI Award for North America for his efforts in lithography simulation and education. He is also an adjunct faculty member at the University of Texas at Austin. Currently, he writes, teaches, and consults on the field of semiconductor microlithography in Austin, Texas.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
Wiley-Interscience
Date d'édition
2007
Langue
anglais
ISBN 10 
0470018933
ISBN 13 
9780470018934
Reliure
Relié
Nombre de pages
544
Coordonnées du fabricant
non disponible
Personne responsable
non disponible

Autres éditions populaires du même titre

9780470727300: Fundamental Principles of Optical Lithography: The Science of Microfabrication

Edition présentée

ISBN 10 :  0470727306 ISBN 13 :  9780470727300
Editeur : JW, 2012
Couverture souple