Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers - Couverture rigide

Kao, Imin; Chung, Chunhui

Couverture rigide

ISBN 10 : 0470061219 ISBN 13 : 9780470061213

Editeur : John Wiley & Sons Inc, 2021

Synopsis

Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.

This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.

A propos du livre

À propos de l?auteur

Imin Kao, is Professor in the Department of Mechanical Engineering at the State University of New York in Stony Brook, USA. He is Faculty Director of the Undergraduate College in Information and Technology Studies. He holds three patents, and his research foci include robotic manipulation with soft contacts and smart contact surface technology using MEMS.

Chunhui Chung, is Associate Professor in the Department of Mechanical Engineering at the National Cheng Kung University in Taiwan.

Détails de l'édition

• Éditeur: John Wiley & Sons Inc
• Date d'édition: 2021
• Langue: anglais
• ISBN 10: 0470061219
• ISBN 13: 9780470061213
• Reliure: Relié
• Nombre de pages: 304
• Coordonnées du fabricant: JOSSEY-BASS; https://www.wiley.com/en-us; ; 111 River Street; Hoboken; NJ; 7030; Etats-Unis
• Personne responsable: non disponible