Surfaces, Interfaces, and Thin Films for Microelectronics - Couverture rigide

Irene, Eugene A.

 
9780470174470: Surfaces, Interfaces, and Thin Films for Microelectronics
Couverture rigide
ISBN 10 : 0470174471 ISBN 13 : 9780470174470
Editeur : Wiley-Interscience, 2008

Synopsis

The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the electronics industry get up to speed fast. It is also an excellent text for upper-level graduate and undergraduate students.

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À propos de l?auteur

Eugene A. Irene, PhD, is Professor of Chemistry at the University of North Carolina, Chapel Hill.?Prior to that appointment, he worked in the Thomas J. Watson Research Center at IBM for ten years. Professor Irene has written more than 250 journal publications and is the author of various books, including Electronic Materials Science (Wiley). He is coeditor of Handbook of Ellipsometry and numerous scientific reviews and book chapters.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
Wiley-Interscience
Date d'édition
2008
Langue
anglais
ISBN 10 
0470174471
ISBN 13 
9780470174470
Reliure
Relié
Nombre de pages
536
Coordonnées du fabricant
non disponible
Personne responsable
non disponible