Book by Sze Simon M
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A basic introduction to the physical properties of semiconductor devices and fabrication technology, this work presents the theoretical and practical aspects of every step in device fabrication, with an emphasis on integrated circuits. Divided into three parts, it covers the basic properties of semiconductors and processes, emphasizing silicon and gallium arsenide; the physics and characteristics of semiconductor devices, bipolar and unipolar devices, and special microwave and photonic devices; and the latest processing technologies, from crystal growth to lithographic pattern transfer.
Semiconductor Devices: Physics and Technology, Third Edition is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
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