A User's Guide to Vacuum Technology - Couverture rigide

O'Hanlon, John F.

Couverture rigide

ISBN 10 : 0471270520 ISBN 13 : 9780471270522

Editeur : Wiley-Interscience, 2003

Synopsis

In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.

A propos du livre

À propos de l?auteur

JOHN F. O'HANLON, PHD, is Emeritus Professor of Electrical and Computer Engineering at the University of Arizona in Tucson.

Détails de l'édition

• Éditeur: Wiley-Interscience
• Date d'édition: 2003
• Langue: anglais
• ISBN 10: 0471270520
• ISBN 13: 9780471270522
• Reliure: Relié
• Numéro d'édition: 3
• Nombre de pages: 536
• Coordonnées du fabricant: non disponible
• Personne responsable: non disponible