Analysis of Microelectronic Materials and Devices - Couverture rigide

Grasserbauer, M.; Werner, H. W.

Couverture rigide

ISBN 10 : 0471917133 ISBN 13 : 9780471917137

Editeur : John Wiley & Sons Ltd, 1991

Synopsis

Presents a comprehensive survey of analytical techniques currently used in support of all stages of microelectronic materials and device processing. The diversity of topics covered has been achieved by bringing together an international field of authors contributing specialized chapters.

A propos du livre

Présentation de l'éditeur

This book presents, for the first time, a comprehensive survey ofanalytical techniques currently used in support of all stages ofmicroelectronic materials and device processing. The diversity oftopics covered in this book has been achieved by bringing togetheran international field of authors contributing specializedindividual chapters. This has ensured that each technique isdiscussed in detail giving in–depth treatments of the subjectmatter. A particularly helpful feature in this book is the concisetechnical summary given at the end of each section. Four majorareas are considered in this volume:
∗ Bulk analysis of microelectronic materials

∗ Analysis of surfaces, interfaces and thin films

∗ Structure analysis on an atomic scale

∗ Characterization of physical, electrical and topographicfeatures
Complete with over 400 illustrations, this volume is anindispensible guide to analytical support for the microelectronicindustry.

Détails de l'édition

• Éditeur: John Wiley & Sons Ltd
• Date d'édition: 1991
• Langue: anglais
• ISBN 10: 0471917133
• ISBN 13: 9780471917137
• Reliure: Relié
• Nombre de pages: 980
• Coordonnées du fabricant: non disponible
• Personne responsable: Buchpark GmbH; gpsr@buchpark.de; ; Krügerweg 1; Trebbin; Brandenburg; 14959; Allemagne