A User's Guide to Ellipsometry - Couverture souple

Tompkins, Harland G

Couverture souple

ISBN 10 : 0486450287 ISBN 13 : 9780486450285

Editeur : Dover Publications Inc., 2006

Synopsis

This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry -- particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.
A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.

A propos du livre

Présentation de l'éditeur

This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.

Détails de l'édition

• Éditeur: Dover Publications Inc.
• Date d'édition: 2006
• Langue: anglais
• ISBN 10: 0486450287
• ISBN 13: 9780486450285
• Reliure: Broché
• Nombre de pages: 272
• Coordonnées du fabricant: non disponible
• Personne responsable: non disponible