Frontiers Of Characterization And Metrology For Nanoelectronics: 2007 International Conference on Frontiers of Characterization and Metrology for ... Gaithersburg, Maryland 27-29 March 2007 - Couverture rigide

Couverture rigide

ISBN 10 : 0735404410 ISBN 13 : 9780735404410

Editeur : American Institute of Physics, 2007

Synopsis

As the semiconductor industry continues to move toward silicon nanoelectronics and beyond, the introduction of new materials, innovative processing and assembly, and novel devices brings formidable metrology challenges. This book emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics.

Détails de l'édition

• Éditeur: American Institute of Physics
• Date d'édition: 2007
• Langue: anglais
• ISBN 10: 0735404410
• ISBN 13: 9780735404410
• Reliure: Relié
• Nombre de pages: 592
• Éditeur: Seiler David G., Diebold Alain C., McDonald Robert, Garner C. Michael, Herr Dan, Khosla Rajinder P., Secula Erik M.
• Coordonnées du fabricant: Springer-Verlag GmbH; customerservice@springernature.com; ; Tiergartenstraße 17; Heidelberg; Baden-Württemberg; 69121; Allemagne