Micro-Electro-Mechanical Systems (Mems) 1998: Micro-Manuacturing Processes in Mems and Other Advanced Systems - Couverture souple

International Mechanical Engineering Congress And Exposition (1996 : Atlanta, Ga.); American Society Of Mechanical Engineers Dynamic Systems And Control Division

 
9780791815960: Micro-Electro-Mechanical Systems (Mems) 1998: Micro-Manuacturing Processes in Mems and Other Advanced Systems