Articles liés à Handbook of Semiconductor Silicon Technology

Handbook of Semiconductor Silicon Technology - Couverture rigide

O'Mara, William C.; Herring, Robert B.; Hunt, Lee P.

 
9780815512370: Handbook of Semiconductor Silicon Technology
Couverture rigide
ISBN 10 : 0815512376 ISBN 13 : 9780815512370
Editeur : William Andrew Publishing, 1990

Synopsis

This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth. Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, wafer fabrication, epitaxial and CVD deposition are addressed by experts in these fields. Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon, and nitrogen impurities. The book contains an extensive set of references, tables of materials constants, and silicon properties, and a presentation on the state of the art of materials manufacturing.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Présentation de l'éditeur

This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth.

Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, wafer fabrication, epitaxial and CVD deposition are addressed by experts in these fields. Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon, and nitrogen impurities. The book contains an extensive set of references, tables of materials constants, and silicon properties, and a presentation on the state of the art of materials manufacturing.

Revue de presse

"...comprehensive, up-to-date book..." - SAMPE Journal

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
William Andrew Publishing
Date d'édition
1990
Langue
anglais
ISBN 10 
0815512376
ISBN 13 
9780815512370
Reliure
Relié
Nombre de pages
816
Coordonnées du fabricant
non disponible
Personne responsable
non disponible