Optical Imaging In Projection Microlithography - Couverture souple

Wong, Alfred K.

 
9780819458292: Optical Imaging In Projection Microlithography
Couverture souple
ISBN 10 : 0819458295 ISBN 13 : 9780819458292
Editeur : SPIE Press, 2005

Synopsis

Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.

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Éditeur
SPIE Press
Date d'édition
2005
Langue
anglais
ISBN 10 
0819458295
ISBN 13 
9780819458292
Reliure
Broché
Nombre de pages
276
Coordonnées du fabricant
non disponible
Personne responsable
non disponible