Microlithography: Science and Technology - Couverture rigide

 
9780824799533: Microlithography: Science and Technology
Couverture rigide
ISBN 10 : 0824799534 ISBN 13 : 9780824799533
Editeur : Marcel Dekker Inc, 1998

Synopsis

This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Présentation de l'éditeur

This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
Marcel Dekker Inc
Date d'édition
1998
Langue
anglais
ISBN 10 
0824799534
ISBN 13 
9780824799533
Reliure
Relié
Nombre de pages
780
Éditeur
Sheats James R., Smith Bruce W.
Coordonnées du fabricant
non disponible
Personne responsable
non disponible