Microelectronics Processing: Chemical Engineering Aspects - Couverture rigide

 
9780841214750: Microelectronics Processing: Chemical Engineering Aspects
Couverture rigide
ISBN 10 : 0841214751 ISBN 13 : 9780841214750
Editeur : American Chemical Society, 1989

Synopsis

Although chemical engineering principles are at the heart of solid state process technology, until now no reference volume addressing this relationship was available. This is the first book of its kind to tie fundamental engineering concepts to solid state process technology. Discussing the basic concepts involved―liquid-phase epitaxy, physical and chemical vapor deposition, diffusion and oxidation in silicon, resists in microlithography, etc.―this volume will be particularly useful in chemical engineering courses. It offers a framework within which specialized courses in microelectronics processing can be organized. In addition, it serves as a valuable reference source for all industrial engineers working with the individual process steps covered.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Présentation de l'éditeur

Although chemical engineering principles are at the heart of solid state process technology, until now no reference volume addressing this relationship was available. This is the first book of its kind to tie fundamental engineering concepts to solid state process technology. Discussing the basic concepts involved--liquid-phase epitaxy, physical and chemical vapor deposition, diffusion and oxidation in silicon, resists in microlithography, etc.--this volume will be particularly useful in chemical engineering courses. It offers a framework within which specialized courses in microelectronics processing can be organized. In addition, it serves as a valuable reference source for all industrial engineers working with the individual process steps covered.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
American Chemical Society
Date d'édition
1989
Langue
anglais
ISBN 10 
0841214751
ISBN 13 
9780841214750
Reliure
Relié
Nombre de pages
524
Éditeur
Hess Dennis W., Jensen Klaus F.
Coordonnées du fabricant
non disponible
Personne responsable
non disponible