Introduction to Microlithography - Couverture rigide

 
9780841228481: Introduction to Microlithography
Couverture rigide
ISBN 10 : 0841228485 ISBN 13 : 9780841228481
Editeur : American Chemical Society, 1994

Synopsis

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Présentation de l'éditeur

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
American Chemical Society
Date d'édition
1994
Langue
anglais
ISBN 10 
0841228485
ISBN 13 
9780841228481
Reliure
Relié
Numéro d'édition
2
Nombre de pages
540
Éditeur
Thompson Larry F., Willson C. Grant, Bowden Murrae J.
Coordonnées du fabricant
non disponible
Personne responsable
non disponible