Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing - Couverture rigide

Couverture rigide

ISBN 10 : 0849335434 ISBN 13 : 9780849335433

Editeur : CRC Press Inc, 2005

Synopsis

As science pushes closer toward the atomic size scale, new challenges arise to slow the pace of the miniaturization that has transformed our society and fueled the information age. New technologies are necessary to surpass these obstacles and realize the tremendous growth predicted by Moore's law. Assembled from the works of pioneering researchers, Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing presents new developments and technologies for producing the next generation of electronic circuits and displays.

This book introduces radical-reaction-based semiconductor manufacturing technologies that overcome the limitations of the existing molecule-reaction-based technologies. It systematically details the procedures and underlying concepts involved in wet process technologies and applications. Following an introduction to semiconductor surface chemical electronics, expert contributors discuss the principles and technology of high-performance wet cleaning; etching technologies and processes; antistatic technology; wet vapor resist stripping technology; and process and safety technologies including waste reclamation, chemical composition control, and ultrapure water and liquid chemical supply systems and materials for fluctuation-free facilities.

Currently, large production runs are needed to balance the costs of acquiring and tuning equipment for specialized operating conditions. Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing explains the technologies and processes used to meet the demand for variety and low volumes that exists in today's digital electronics marketplace.

A propos du livre

À propos de l'auteur

Tadahiro Ohmi

Détails de l'édition

• Éditeur: CRC Press Inc
• Date d'édition: 2005
• Langue: anglais
• ISBN 10: 0849335434
• ISBN 13: 9780849335433
• Reliure: Relié
• Nombre de pages: 386
• Éditeur: Ohmi Tadahiro
• Coordonnées du fabricant: non disponible
• Personne responsable: non disponible