Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing - Couverture souple

 
9780878493913: Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing
Couverture souple
ISBN 10 : 0878493913 ISBN 13 : 9780878493913
Editeur : Trans Tech Publications Ltd, 2008

Synopsis

Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of integrated circuit technology. In order to minimize undesired diffusion, and other thermal budget-dependent effects, the trend has been to reduce the annealing time sharply by switching from standard furnace batch-processing (involving several hours or even days), to rapid thermal processing involving soaking times of just a few seconds. This transition from thermal equilibrium, to highly non-equilibrium, processing was very challenging and is still a field ripe for further development.

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Éditeur
Trans Tech Publications Ltd
Date d'édition
2008
Langue
anglais
ISBN 10 
0878493913
ISBN 13 
9780878493913
Reliure
Broché
Nombre de pages
448
Éditeur
Lerch Wielfried, Niess Jürgen
Coordonnées du fabricant
non disponible
Personne responsable
non disponible