Nanopositioning Book: Moving and Measuring to Better Than a Nanometre - Couverture rigide

Hicks, Thomas R.; Atherton, Paul D.

 
9780953065806: Nanopositioning Book: Moving and Measuring to Better Than a Nanometre

Synopsis

This text sets out to: define and clarify terms used in specifying nanoprecision mechanisms (accuracy, precision, linearity); provide a guide to the servocontrol systems used in the authors' products; and give a general description of technologies involved in measuring and moving small distances.

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