Articles liés à Cmos GateStack Scaling - Materials, Interfaces and...

Cmos GateStack Scaling - Materials, Interfaces and Reliability Implications - Couverture souple

Demkov, Alexander A.

 
9781107408326: Cmos GateStack Scaling - Materials, Interfaces and Reliability Implications
Couverture souple
ISBN 10 : 1107408326 ISBN 13 : 9781107408326
Editeur : Cambridge University Press, 2014

Synopsis

To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Présentation de l'éditeur

To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
Cambridge University Press
Date d'édition
2014
Langue
anglais
ISBN 10 
1107408326
ISBN 13 
9781107408326
Reliure
Broché
Nombre de pages
192
Coordonnées du fabricant
non disponible
Personne responsable
Avery
https://www.avery.fr/

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