Doping Engineering for FrontEnd Processing - Couverture souple

Pawlak, B. J.

 
9781107408548: Doping Engineering for FrontEnd Processing
Couverture souple
ISBN 10 : 1107408547 ISBN 13 : 9781107408548
Editeur : Cambridge University Press, 2014

Synopsis

Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Présentation de l'éditeur

Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
Cambridge University Press
Date d'édition
2014
Langue
anglais
ISBN 10 
1107408547
ISBN 13 
9781107408548
Reliure
Broché
Nombre de pages
334
Coordonnées du fabricant
non disponible
Personne responsable
Avery
https://www.avery.fr/

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Dardilly
France