Chemical Processing of Dielectrics, Insulators and Electronic Ceramics - Couverture souple

Jones, Anthony C.

9781107413207: Chemical Processing of Dielectrics, Insulators and Electronic Ceramics

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ISBN 10 : 1107413206 ISBN 13 : 9781107413207

Editeur : Cambridge University Press, 2014

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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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�diteur: Cambridge University Press
Date d'�dition: 2014
Langue: anglais
ISBN 10: 1107413206
ISBN 13: 9781107413207
Reliure: Broch�
Nombre de pages: 326
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Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606 (MRS Proceedings)

Jones, Anthony C.

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ISBN 10 : 1107413206 ISBN 13 : 9781107413207

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Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606

Anthony C. Jones

Edit� par Cambridge University Press, GB, 2014

ISBN 10 : 1107413206 ISBN 13 : 9781107413207

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Paperback. Etat : New. This book focuses on the creative use of chemistry in the fabrication of a variety of oxide and non-oxide materials which are likely to play a crucial role in the development of the next generation of microelectronics devices. It includes inorganic precursor chemistry, gas-phase and solid-state chemistry, materials science, chemical physics and chemical engineering. Highlights include the deposition of high-k dielectric gate oxides, ferroelectric oxide films for infrared and memory applications, low-k dielectrics, TiN and TaN diffusion barriers, and fresh precursors for III-V nitrides. The emphasis is on chemical methods for the controlled deposition of thin films, for which chemical vapor deposition (CVD) has proven to be a useful and versatile technique. Of particular interest is the use of liquid-injection MOCVD for the deposition of oxide multilayers and superlattices. Solution deposition techniques such as sol-gel, metalorganic decomposition (MOD), hydrothermal processing are also prominently featured. Topics include: CVD of oxide ceramics; CVD of nonoxide ceramics; solution deposition of electronic ceramics; alternative chemical processing methods and characterization of electronic ceramics. N� de r�f. du vendeur LU-9781107413207

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Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606

Edited by Anthony C. Jones , Janice Veteran , Donald Mullin , Reid Cooper , Sanjeev Kaushal

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Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606 (MRS Proceedings)

Jones, Anthony C.

Edit� par Cambridge University Press, 2014

ISBN 10 : 1107413206 ISBN 13 : 9781107413207

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Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606 (MRS Proceedings)

Anthony C. Jones

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Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606 (MRS Proceedings)

Jones, Anthony C.

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ISBN 10 : 1107413206 ISBN 13 : 9781107413207

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Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606

Anthony C. Jones

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Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606 (MRS Proceedings)

Jones, Anthony C.

Edit� par Cambridge University Press, 2014

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Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606 (Paperback)

Anthony C. Jones

Edit� par Cambridge University Press, Cambridge, 2014

ISBN 10 : 1107413206 ISBN 13 : 9781107413207

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Paperback. Etat : new. Paperback. This book focuses on the creative use of chemistry in the fabrication of a variety of oxide and non-oxide materials which are likely to play a crucial role in the development of the next generation of microelectronics devices. It includes inorganic precursor chemistry, gas-phase and solid-state chemistry, materials science, chemical physics and chemical engineering. Highlights include the deposition of high-k dielectric gate oxides, ferroelectric oxide films for infrared and memory applications, low-k dielectrics, TiN and TaN diffusion barriers, and fresh precursors for III-V nitrides. The emphasis is on chemical methods for the controlled deposition of thin films, for which chemical vapor deposition (CVD) has proven to be a useful and versatile technique. Of particular interest is the use of liquid-injection MOCVD for the deposition of oxide multilayers and superlattices. Solution deposition techniques such as sol-gel, metalorganic decomposition (MOD), hydrothermal processing are also prominently featured. Topics include: CVD of oxide ceramics; CVD of nonoxide ceramics; solution deposition of electronic ceramics; alternative chemical processing methods and characterization of electronic ceramics. The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This item is printed on demand. Shipping may be from our UK warehouse or from our Australian or US warehouses, depending on stock availability. N� de r�f. du vendeur 9781107413207

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