Measurement Technology for Micro-Nanometer Devices - Couverture rigide

Zhang, Wendong; Chou, Xiujian; Shi, Tielin; Ma, Zongmin; Bao, Haifei; Chen, Jingdong; Chen, Liguo; Li, Dachao; Xue, Chenyang

Couverture rigide

ISBN 10 : 1118717961 ISBN 13 : 9781118717967

Editeur : John Wiley & Sons Inc, 2016

Synopsis

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale

• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices

A propos du livre

À propos de l?auteur

WENDONG ZHANG, North University of China, China

XIUJIAN CHOU, North University of China, China

TIELIN SHI, Huazhong University of Science and Technology, China

ZONGMIN MA, North University of China, China

HAIFEI BAO, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China

JING CHEN, Peking University, China

LIGUO CHEN, Soochow University, China

DACHAO LI, Tianjin University, China

CHENYANG XUE, Key Laboratory of Instrument Science and Dynamic Measurement, Ministry of Education, China

Détails de l'édition

• Éditeur: John Wiley & Sons Inc
• Date d'édition: 2016
• Langue: anglais
• ISBN 10: 1118717961
• ISBN 13: 9781118717967
• Reliure: Relié
• Nombre de pages: 352
• Coordonnées du fabricant: non disponible