Copper Interconnect Technology - Couverture rigide

Gupta, Tapan

Couverture rigide

ISBN 10 : 1441900756 ISBN 13 : 9781441900753

Editeur : Springer-Verlag New York Inc., 2009

Synopsis

Since overall circuit performance has depended primarily on transistor properties, previous efforts to enhance circuit and system speed were focused on transistors as well. During the last decade, however, the parasitic resistance, capacitance, and inductance associated with interconnections began to influence circuit performance and will be the primary factors in the evolution of nanoscale ULSI technology. Because metallic conductivity and resistance to electromigration of bulk copper (Cu) are better than aluminum, use of copper and low-k materials is now prevalent in the international microelectronics industry. As the feature size of the Cu-lines forming interconnects is scaled, resistivity of the lines increases. At the same time electromigration and stress-induced voids due to increased current density become significant reliability issues. Although copper/low-k technology has become fairly mature, there is no single book available on the promise and challenges of these next-generation technologies. In this book, a leader in the field describes advanced laser systems with lower radiation wavelengths, photolithography materials, and mathematical modeling approaches to address the challenges of Cu-interconnect technology.

A propos du livre

Présentation de l'éditeur

In this book, a leader in the field describes advanced laser systems with lower radiation wavelengths, photolithography materials, and mathematical modeling approaches to address the challenges of Cu-interconnect technology.

Détails de l'édition

• Éditeur: Springer-Verlag New York Inc.
• Date d'édition: 2009
• Langue: anglais
• ISBN 10: 1441900756
• ISBN 13: 9781441900753
• Reliure: Relié
• Nombre de pages: 442
• Coordonnées du fabricant: Springer Nature Customer Service Center GmbH; ProductSafety@springernature.com; ; Europaplatz 3; Heidelberg; 69115; Allemagne