MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness - Couverture souple

Acar, Cenk; Shkel, Andrei

 
9781441934895: MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness

Synopsis

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

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Présentation de l'éditeur

This detailed book provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes. It introduces structural designs that provide inherent robustness against structural and environmental variations.

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Autres éditions populaires du même titre

9780387560700: Mems Vibratory Gyroscopes

Edition présentée

ISBN 10 :  038756070X ISBN 13 :  9780387560700
Couverture souple