Synopsis
MEMS and their unique behavior.- Lumped modeling principles.- Lumped modeling of MEMS devices.- Introduction to nonlinear mechanics.- Introduction to nonlinear oscillations.- Introduction to structural mechanics.- Introduction to computational methods in MEMS.- Special Topic I: Global dynamics of electrostatically actuated devices.- Special Topic II: Sticktion and adhesion of microbeams due to electrostatic and capillary forces.- Special Topic III: Mechanical shock of microstructures.
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