Introduction.- Critical issues in Oxide-Semiconductor Heteroepitaxy.- Predictive Engineering of Semiconductor-Oxide Interfaces.- Crystalline Functional Oxide Growth Methods.- Thin Oxide Film Characterization Methods.- Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy.- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates.- Other Epitaxial Oxides on Semiconductors.- Outlook and Parting Thoughts.- Appendices.
Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.