High Resolution Focused Ion Beams: FIB and its Applications : The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology - Couverture souple

Orloff, Jon; Swanson, Lynwood; Utlaut, Mark

 
9781461507666: High Resolution Focused Ion Beams: FIB and its Applications : The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology

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Synopsis

Preface. About the Authors. Introduction. 1. Field Ionization Sources. 2. Physics of Liquid Metal Ion Sources. 3. Ion Optics for LMIS. 4. Interactions of Ions with Solids. 5. Practical Focused Ion Beam Optics and Systems. 6. Applications of Focused Ion Beams. Appendix 1. Elements of the Theory of Field Desorption and Ionization. Appendix 2. Table of Sputter Yields. Index.

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Autres éditions populaires du même titre

9780306473500: High Resolution Focused Ion Beams: Fib and Its Applications : The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology

Edition présentée

ISBN 10 :  030647350X ISBN 13 :  9780306473500
Editeur : Plenum Publishing Co.,N.Y., 2002
Couverture rigide