Synopsis
Foreword; Preface; Author's biographies; Acknowledgments; Introduction; Manufacturing yield; Problem diagnosis; Manufacturing defect classification system; Product dimensional metrology and pattern defect inspection; Process and tool monitoring; Contamination monitoring; Repair and rework; Test sites and vehicles for yield and process monitoring; In-line electrical test; Traceability; Failure analysis of semiconductor devices; Materials and chemical analysis of electronic devices; Modeling for manufacturing diagnostics; Artificial intelligence techniques for analysis: expert systems and neural networks; Statistical quality control; Reliability/defect severity; Burn-in; Defect prevention; Index
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