Synopsis
Preface. 1. Introduction. 2. Basics for a thermally actuated micromirror. 3. Microscanner technology. 4. One-dimensional microscanner. 5. Two-dimensional microscanner. 6. Advanced Optical Filters of Porous Silicon. 7. Micromachining using porous Silicon. 8. Tunable Optical Filter and IR Gas Spectroscopy. 9. Conclusions and outlook. Appendices. A.1: Complement to the curvature calculation due to residual stress. A.2: Complement to the static temperature distribution calculation. A.3: Large deflections. References. Symbols and Abbreviations. Glossary of terms. Acknowledgments.
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