User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition - Couverture souple

U.S. Department Of Commerce

Couverture souple

ISBN 10 : 1499211937 ISBN 13 : 9781499211931

Editeur : CreateSpace Independent Publishing Platform, 2014

Synopsis

The Microelectromechanical Systems (MEMS) 5-in-1 is a reference device sold as a NIST Reference Material (RM) that contains MEMS test structures on a test chip. The two RM chips (8096 and 8097) provide for both dimensional and material property measurements. RM 8096 was fabricated on a multiuser 1.5 m complementary metal oxide semiconductor (CMOS) process followed by a bulkmicromachining etch. Material properties of the composite oxide layer are reported on the RM Report of Investigation and described within this guide.3 RM 8097 was fabricated using a polysilicon multi-user surface-micromachining MEMS process with a backside etch. The material properties of the first or second polysilicon layer are reported on the RM Report of Investigation and described within this guide.

Détails de l'édition

• Éditeur: CreateSpace Independent Publishing Platform
• Date d'édition: 2014
• Langue: anglais
• ISBN 10: 1499211937
• ISBN 13: 9781499211931
• Reliure: Broché
• Nombre de pages: 252
• Coordonnées du fabricant: Printed by Amazon on behalf of the author; https://www.amazon.fr/hz/contact-us; ; c/o Amazon Media EU S.à.r.l., 38 Avenue John F. Kennedy; Luxembourg; L-1855; Luxembourg