Articles liés à Principles of Lithography

Principles of Lithography - Couverture rigide

Levinson, Harry J.

 
9781510627604: Principles of Lithography
Couverture rigide
ISBN 10 : 151062760X ISBN 13 : 9781510627604
Editeur : SPIE Press, 2019

Synopsis

This newest edition of Principles of Lithography reflects the continuing advancement of lithographic technology. In recent years, certain topics, such as line-edge roughness (LER), multi-electron-beam writers, and nonlinear overlay models, have become much more significant to practicing lithographers, and more extensive treatments are therefore provided. EUV lithography is on the threshold for use in high-volume manufacturing, at nodes where a number of complex phenomena are relevant, and the chapter on EUV lithography has been expanded accordingly. New references and homework problems have been added. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Éditeur
SPIE Press
Date d'édition
2019
Langue
anglais
ISBN 10 
151062760X
ISBN 13 
9781510627604
Reliure
Relié
Numéro d'édition
4
Nombre de pages
630
Coordonnées du fabricant
non disponible
Personne responsable
non disponible