Optical Lithography for Advanced Semiconductor Patterning - Couverture rigide

Bisschop, Peter De

 
9781510680333: Optical Lithography for Advanced Semiconductor Patterning
Couverture rigide
ISBN 10 : 1510680330 ISBN 13 : 9781510680333
Editeur : SPIE Press, 2025

Synopsis

Optical lithography is one of the key technologies in the fabrication of microchips. This book gives an account of modern lithography during the first half of the 2020s, when high-NA extreme-ultraviolet lithography (EUVL) was being introduced. Central to the book is a comprehensive description of the effects that impact the quality of the optical image inside the resist layer, a story that has become more complicated with every new lithography tool generation. This discussion builds gradually so that anyone with a graduate-type background in physics, chemistry, or mathematics can follow it from the start to the many subtleties of image formation in high-NA EUVL. It uses mathematics when useful and is accompanied by examples and case studies, many of which were created specifically for this book. This book will be of value for people who are new to lithography as well as for the more experienced lithographer.

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Éditeur
SPIE Press
Date d'édition
2025
Langue
anglais
ISBN 10 
1510680330
ISBN 13 
9781510680333
Reliure
Relié
Nombre de pages
1156
Coordonnées du fabricant
non disponible
Personne responsable
non disponible