Articles liés à Extreme Ultraviolet Lithography

Extreme Ultraviolet Lithography - Couverture souple

Levinson, Harry J.

 
9781510692534: Extreme Ultraviolet Lithography
Couverture souple
ISBN 10 : 1510692533 ISBN 13 : 9781510692534
Editeur : SPIE Press, 2026

Synopsis

In this second edition of Extreme Ultraviolet Lithography, coverage is maintained on the fundamental aspects of EUV lithographic technology for topics such as exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Lithography costs, which have often influenced areas of technical focus, are also discussed. Many updates are included that reflect the significant advances in EUV lithography since the publication of the first edition. All topics are approached from the perspective of a practicing lithographer in a wafer fab, working in either manufacturing or development, and there are many references at the end of each chapter.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Éditeur
SPIE Press
Date d'édition
2026
Langue
anglais
ISBN 10 
1510692533
ISBN 13 
9781510692534
Reliure
Broché
Numéro d'édition
2
Nombre de pages
344
Coordonnées du fabricant
non disponible
Personne responsable
non disponible