Ion-Solid Interactions for Materials Modification and Processing: Volume 396 - Couverture rigide

9781558992993: Ion-Solid Interactions for Materials Modification and Processing: Volume 396

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ISBN 10 : 1558992995 ISBN 13 : 9781558992993

Editeur : Materials Research Society, 1996

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Several beam-solid interaction techniques have been developed that can either stand alone or be used in connection with others for materials processing, for fabrication of devices with enhanced electro-optical and mechanical properties, and with enhanced resistance to corrosion and erosion. For example, advances in focused ion beams (FIB) have brought out-of-reach ideas and applications to fruition. This book from MRS focuses on the developments in ion-beam-assisted processing of materials and reviews successful applications of the techniques. Topics include: fundamentals of ion-solid interactions; ion-beam mixing; radiation damage; insulators and wide bandgap materials; polymers; optical materials; plasma and ion-assisted techniques; metals and tribology; focused ion beams; fundamental semiconductor processing and compound semiconductors.

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�diteurMaterials Research Society
Date d'�dition1996
ISBN 10 1558992995
ISBN 13 9781558992993
ReliureReli�
Langueanglais
Nombre de pages897
�diteurCheng Yang-Tse, Harriott Lloyd R., Ila Daryush, Poker David B., Sigmon Thomas W.

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Ion-Solid Interactions for Materials Modification and Processing (Materials Research Society Symposia Proceedings, Volume 396)

David B. Poker , Daryush Ila , Yang-Tse Cheng , Lloyd R. Harriott , Thomas W. Sigmon

Edit� par Materials Research Society, 1996

ISBN 10 : 1558992995 ISBN 13 : 9781558992993

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