Control of Semiconductor Surfaces and Interfaces: Volume 448 - Couverture rigide

Couverture rigide

ISBN 10 : 1558993525 ISBN 13 : 9781558993525

Editeur : Materials Research Society, 1997

Synopsis

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

A propos du livre

Présentation de l'éditeur

Semiconductor surfaces and interfaces play a vital role in modern-day electronic devices. This is especially true as device dimensions shrink. The properties of clean surfaces and chemically processed surfaces can also have a significant impact on the properties of subsequently grown layers. These surfaces and interfaces may exhibit modified structural, electronic and optical properties, so it is important to understand their effects on subsequent growth, processing and device fabrication. Topics in the book include: structure of surfaces; control of surface defects and properties through chemical etching and passivation; modification of surfaces for growth and processing; nucleation on semiconductor surfaces and self-assembly; the effects of surfaces and interfaces on subsequent growth; and the properties of semiconductor/dielectric and semiconductor/ metal interfaces. In situ and ex situ monitoring of these properties, using various electrical and optical techniques are also presented.

Détails de l'édition

• Éditeur: Materials Research Society
• Date d'édition: 1997
• Langue: anglais
• ISBN 10: 1558993525
• ISBN 13: 9781558993525
• Reliure: Relié
• Numéro d'édition: 1
• Nombre de pages: 505
• Éditeur: Brierley S. K., Gibson J. M., Glembocki O. J., Prokes S. M., Woodall J. M.
• Coordonnées du fabricant: non disponible
• Personne responsable: non disponible