Semiconductor Process and Device Performance Modelling: Volume 490 - Couverture rigide

Couverture rigide

ISBN 10 : 1558993959 ISBN 13 : 9781558993952

Editeur : Cambridge University Press, 1998

Synopsis

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

A propos du livre

Présentation de l'éditeur

The concept of a 'virtual semiconductor fab' requires a focused effort among engineering, physics, chemistry, materials, mathematical and computational sciences. Although widely used by the semiconductor industry, current technology computer-aided design (TCAD) struggles to keep pace with new generations of IC technology. The semiconductor industry needs improved, predictive physically-based modelling and simulation capabilities to decrease cost, improve efficiency, and provide TCAD tools to process developers before production begins. Without the use of more advanced next generation TCAD models, future IC technology development will slow as a result of expensive, time-consuming experimental validation of processes and device performance. This book brings together researchers from industry, universities and national laboratories to highlight advances in TCAD, and to identify critical areas for future emphasis. Both silicon and compound semiconductor process and device performance modelling are featured. Topics include: bulk process modelling; equipment modelling; topography modelling; and characterization and device modelling.

Détails de l'édition

• Éditeur: Cambridge University Press
• Date d'édition: 1998
• Langue: anglais
• ISBN 10: 1558993959
• ISBN 13: 9781558993952
• Reliure: Relié
• Nombre de pages: 273
• Éditeur: Dunham Scott T., Nelson Jeffrey S.
• Coordonnées du fabricant: non disponible
• Personne responsable: Avery; https://www.avery.fr/; ; chemin des peupliers 27; Dardilly; France