Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606 - Couverture rigide

Couverture rigide

ISBN 10 : 1558995145 ISBN 13 : 9781558995147

Editeur : Cambridge University Press, 2000

Synopsis

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

A propos du livre

Présentation de l'éditeur

This book focuses on the creative use of chemistry in the fabrication of a variety of oxide and non-oxide materials which are likely to play a crucial role in the development of the next generation of microelectronics devices. It includes inorganic precursor chemistry, gas-phase and solid-state chemistry, materials science, chemical physics and chemical engineering. Highlights include the deposition of high-k dielectric gate oxides, ferroelectric oxide films for infrared and memory applications, low-k dielectrics, TiN and TaN diffusion barriers, and fresh precursors for III-V nitrides. The emphasis is on chemical methods for the controlled deposition of thin films, for which chemical vapor deposition (CVD) has proven to be a useful and versatile technique. Of particular interest is the use of liquid-injection MOCVD for the deposition of oxide multilayers and superlattices. Solution deposition techniques such as sol-gel, metalorganic decomposition (MOD), hydrothermal processing are also prominently featured. Topics include: CVD of oxide ceramics; CVD of nonoxide ceramics; solution deposition of electronic ceramics; alternative chemical processing methods and characterization of electronic ceramics..

Détails de l'édition

• Éditeur: Cambridge University Press
• Date d'édition: 2000
• Langue: anglais
• ISBN 10: 1558995145
• ISBN 13: 9781558995147
• Reliure: Relié
• Nombre de pages: 330
• Éditeur: Jones Anthony C., Veteran Janice, Mullin Donald, Cooper Reid, Kaushal Sanjeev
• Coordonnées du fabricant: non disponible
• Personne responsable: Avery; https://www.avery.fr/; ; chemin des peupliers 27; Dardilly; France