Characterization and Metrology for Ulsi Technology: 1998 International Conference - Couverture rigide

 
9781563967535: Characterization and Metrology for Ulsi Technology: 1998 International Conference
Couverture rigide
ISBN 10 : 1563967537 ISBN 13 : 9781563967535
Editeur : American Institute of Physics, 1998

Synopsis

The proceedings of the 1998 International Conference on Characterization and Metrology for ULSI Technology was dedicated to summarizing major issues and giving critical reviews of important semiconductor techniques that are crucial to continue the advances in semiconductor technology. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing. This is the only book that we know of that emphasizes the science and technology of semiconductor characterization in the factory environment. The increasing importance of monitoring and controlling semiconductor processes make it particularly timely.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Éditeur
American Institute of Physics
Date d'édition
1998
Langue
anglais
ISBN 10 
1563967537
ISBN 13 
9781563967535
Reliure
Relié
Nombre de pages
1025
Éditeur
Seiler David G., Diebold A.C., Bullis W.M., Shaffner T. J., McDonald R., Walters E.J.
Coordonnées du fabricant
non disponible
Personne responsable
non disponible

Autres éditions populaires du même titre

9781563968679: Characterization and Metrology for ULSI Technology: 1998 International Conference, 23-27 March 1998: National Institute of Standards and Technology, Gaithersburg MD, USA

Edition présentée

ISBN 10 :  1563968673 ISBN 13 :  9781563968679
Editeur : American Institute of Physics, 1998
Couverture rigide