Characterization and Metrology for Ulsi Technology: 1998 International Conference - Couverture rigide

Couverture rigide

ISBN 10 : 1563967537 ISBN 13 : 9781563967535

Editeur : American Institute of Physics, 1998

Synopsis

The proceedings of the 1998 International Conference on Characterization and Metrology for ULSI Technology was dedicated to summarizing major issues and giving critical reviews of important semiconductor techniques that are crucial to continue the advances in semiconductor technology. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing. This is the only book that we know of that emphasizes the science and technology of semiconductor characterization in the factory environment. The increasing importance of monitoring and controlling semiconductor processes make it particularly timely.

Détails de l'édition

• Éditeur: American Institute of Physics
• Date d'édition: 1998
• Langue: anglais
• ISBN 10: 1563967537
• ISBN 13: 9781563967535
• Reliure: Relié
• Nombre de pages: 1025
• Éditeur: Seiler David G., Diebold A.C., Bullis W.M., Shaffner T. J., McDonald R., Walters E.J.
• Coordonnées du fabricant: non disponible
• Personne responsable: non disponible