Articles liés à Characterization in Silicon Processing

Characterization in Silicon Processing - Couverture rigide

Strausser, Yale E.

 
9781606501092: Characterization in Silicon Processing
Couverture rigide
ISBN 10 : 1606501097 ISBN 13 : 9781606501092
Editeur : Momentum Press, 2010

Synopsis

With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume in "Materials Characterization Series" focuses on the process flow of silicon wafer manufacture where materials properties, processing and associated problems are brought to the fore. The book is organized by the types of materials commonly associated with integrated silicon semiconductor circuits and the typical processes involved for each such material, including deposition, thermal treatment, and lithography. Readers will find features such as: the essential processes of Silicon Epitaxial Growth; the coverage of Polysilicon Conductors, Silicides, Aluminum- and Copper-based Conductors, Tungsten-based Conductors; and, concise summaries of major characterization technologies for silicon and related semiconductor materials, including Auger Electron Spectroscopy, Energy-Dispersive X-Ray Spectroscopy, Neutron Activation Analysis and Raman Spectroscopy.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

À propos de l'auteur

Yale E. Strausser

Les informations fournies dans la section « A propos du livre » peuvent faire référence à une autre édition de ce titre.

Éditeur
Momentum Press
Date d'édition
2010
Langue
anglais
ISBN 10 
1606501097
ISBN 13 
9781606501092
Reliure
Relié
Nombre de pages
240
Coordonnées du fabricant
non disponible
Personne responsable
non disponible