Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography - Couverture souple

Filatov, D O

 
9781616686741: Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography
Couverture souple
ISBN 10 : 161668674X ISBN 13 : 9781616686741
Editeur : Nova Science Publishers Inc, 2010

Synopsis

This book presents and discusses a promising technology for fabrication of the one- and two-dimensional nanoperiodic structures on the solid surfaces by direct two- and four-beam standing wave pulsed laser modification. This method being developed extensively at present is very promising for application in nanoelectronics, data storage, integrated optics, and is considered to be a promising alternative to X-ray lithography in a wide range of applications.

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Éditeur
Nova Science Publishers Inc
Date d'édition
2010
Langue
anglais
ISBN 10 
161668674X
ISBN 13 
9781616686741
Reliure
Broché
Nombre de pages
87
Coordonnées du fabricant
non disponible
Personne responsable
eucomply OÜ
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Pärnu mnt 139b-14
Tallinn
11317
Estonie