Articles liés à Silicide Technology for Integrated Circuits

Silicide Technology for Integrated Circuits - Couverture souple

Chen, Lih J

 
9781849190657: Silicide Technology for Integrated Circuits
Couverture souple
ISBN 10 : 1849190658 ISBN 13 : 9781849190657
Editeur : Institute of Electrical Engineers of Japan, 2023

Synopsis

Silicide Technology for Integrated Circuits focuses on the task of developing and applying metal silicide technology as it emerges from the scientific to the prototype and manufacturing stages and provides guidance on the application of the latest emerging technology.

The book begins with an overview of silicide technology and moves on to provide the fundamentals of silicide formation, including various processing methods. Topics such as the optical emission properties of Fe silicide and their importance for Si-based optoelectronics are discussed, along with Si-Ge and SOI, which represent two possible substrate frames for the next-generation of Si-based device technology. This invaluable publication also provides comprehensive coverage of the characterisation methods used in silicide technology.

Les informations fournies dans la section « Synopsis » peuvent faire référence à une autre édition de ce titre.

Éditeur
Institute of Electrical Engineers of Japan
Date d'édition
2023
Langue
anglais
ISBN 10 
1849190658
ISBN 13 
9781849190657
Reliure
Broché
Nombre de pages
298
Coordonnées du fabricant
non disponible
Personne responsable
non disponible