Nanolithography and Patterning Techniques in Microelectronics - Couverture rigide

Couverture rigide

ISBN 10 : 1855739313 ISBN 13 : 9781855739314

Editeur : Woodhead Publishing Ltd, 2005

Synopsis

Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100nm or less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using nanolithography scientists can drive patterning currents through surfaces while building a 3D structure from a series of patterned layers. Electron induced chemical lithography can create ultra-high resolution templates for the site selective immobilisation of molecules, to form functional, hierarchically, organised structures. This book concentrates on state-of-the-art nanolithographic methods with a particular emphasis on polymer research.

Key Features: looks at alternative approaches used to develop complex patterns at the nanoscale; concentrates on state of the art nanolithographic methods; written by a distinguished international team of contributors.

Contents: Copolymer ordering; Templated synthesis for controlled 3D structural control; Surface-induced structure formation of polymer blends; Rapid prototyping of functional microfabricated devices by soft lithography; Control of polymer topography; AFM based patterning; Patterning of confined polymer thin films; Ion beam patterning; Nanoprinting techniques; Photolithography beyond the diffraction limit; Standard printing techniques for unconventional methods; Microfluidics; Manipulation of biomolecules and reactions; Fabrication of organic display devices; Printing techniques for plastic electronics.

A propos du livre

À propos de l'auteur

Dr David Bucknall is an Associate Professor at the Georgia Institute of Technology. He holds a joint appointment in the School of Polymers, Textiles and Fiber Engineering and the School of Materials Science and Engineering.

Détails de l'édition

• Éditeur: Woodhead Publishing Ltd
• Date d'édition: 2005
• Langue: anglais
• ISBN 10: 1855739313
• ISBN 13: 9781855739314
• Reliure: Relié
• Nombre de pages: 424
• Éditeur: Bucknall D
• Coordonnées du fabricant: ELSEVIER; https://www.elsevier.com/es-es; ; Mooswaldallee 6; Freiburg; 79108; Allemagne